APPARATUS AND METHODS FOR FORMING FILMS ON SUBSTRATES

Details for Australian Patent Application No. 2003303302 (hide)

Owner SYMYX TECHNOLOGIES, INC.

Inventors RAMBERG, Eric, C.; DEVENNEY, Martin; CENDAK, Keith; NGUYEN, Sum; FAN, Qun; WANG, Xuejun; CHONDROUDIS, Konstantinos

Pub. Number AU-A-2003303302

PCT Number PCT/US2003/0159

PCT Pub. Number WO2004/073048

Priority 10/158,375 30.05.02 US; 60/384,258 30.05.02 US

Filing date 20 May 2003

Wipo publication date 6 September 2004

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

19 August 2004 Complete Application Filed

  Priority application(s): 10/158,375 30.05.02 US; 60/384,258 30.05.02 US

7 October 2004 Application Open to Public Inspection

  Published as AU-A-2003303302

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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