PROJECTION OPTICAL SYSTEM FOR LITHOGRAPHY AND MIRROR FOR SAID SYSTEM

Details for Australian Patent Application No. 2003303245 (hide)

Owner CARL ZEISS SMT AG

Inventors SAND, Rolf; MANN, Hans-Jurgen; ULRICH, Wilhelm

Pub. Number AU-A-2003303245

PCT Number PCT/EP2003/0110

PCT Pub. Number WO2004/057400

Priority 102 61 137.8 21.12.02 DE

Filing date 4 October 2003

Wipo publication date 14 July 2004

International Classifications

G02B 017/06 Systems with reflecting surfaces, with or without refracting elements

G02B 005/08 Optical elements other than lenses - Mirrors

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G02B 005/09 Optical elements other than lenses - Multifaceted or polygonal mirrors

G02B 005/10 Optical elements other than lenses - with curved faces

G02B 005/18 Optical elements other than lenses - Diffracting gratings

G02B 027/44 Other optical systems

Event Publications

12 August 2004 Complete Application Filed

  Priority application(s): 102 61 137.8 21.12.02 DE

19 August 2004 Application Open to Public Inspection

  Published as AU-A-2003303245

22 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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