METHOD OF PRODUCING SEMICONDUCTOR ELEMENTS USING A TEST STRUCTURE

Details for Australian Patent Application No. 2003303175 (hide)

Owner KONINKLIJKE PHILIPS ELECTRONICS N.V.

Inventors SIMON, Paul, L., C.; VAN DE POL, Aalt, M.

Pub. Number AU-A-2003303175

PCT Number PCT/IB2003/0057

PCT Pub. Number WO2004/057672

Priority 02080535.4 20.12.02 EP

Filing date 5 December 2003

Wipo publication date 14 July 2004

International Classifications

H01L 023/544 Details of semiconductor or other solid state devices - Marks applied to semiconductor devices, e.g. registration marks, test patterns

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

12 August 2004 Complete Application Filed

  Priority application(s): 02080535.4 20.12.02 EP

19 August 2004 Application Open to Public Inspection

  Published as AU-A-2003303175

22 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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