METHOD OF DETERMINING PROPERTIES OF PATTERNED THIN FILM METAL STRUCTURES USING TRANSIENT THERMAL RESPONSE

Details for Australian Patent Application No. 2003302975 (hide)

Owner KONINKLIJKE PHILIPS ELECTRONICS N.V.

Inventors MAZNEV, Alexei; GOSTEIN, Michael

Pub. Number AU-A-2003302975

PCT Number PCT/IB2003/0058

PCT Pub. Number WO2004/055476

Priority 60/433,312 13.12.02 US

Filing date 10 December 2003

Wipo publication date 9 July 2004

International Classifications

G01B 011/06 Measuring arrangements characterised by the use of optical means - for measuring thickness

G01B 021/08 Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the other groups of this subclass - for measuring thickness

Event Publications

5 August 2004 Complete Application Filed

  Priority application(s): 60/433,312 13.12.02 US

19 August 2004 Application Open to Public Inspection

  Published as AU-A-2003302975

22 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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