Owner SAMSUNG ELECTRONICS CO., LTD.

Inventors SONG, Keun-Kyu; ROH, Nam-Seok; HONG, Mun-Pyo

Pub. Number AU-A-2003302798

PCT Number PCT/KR2003/0026

PCT Pub. Number WO2004/053970

Priority 10-2002-0078016 09.12.02 KR

Filing date 5 December 2003

Wipo publication date 30 June 2004

H01L 021/312 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/3105 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03F 007/00 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces

G03F 007/42 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Stripping or agents therefor

G02F 001/136 Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating

B08B 011/00 Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto

B08B 003/10 Cleaning by methods involving the use or presence of liquid or steam - with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity, by vibration

B08B 007/04 Cleaning by methods not provided for in a single other subclass or a single group in this subclass - by a combination of operations

C23G 005/00 Cleaning or de-greasing metallic material by other methods