RAW SOLUTION FEEDING SYSTEM FOR VAPORIZER AND METHOD OF CLEANING THE RAW SOLUTION FEEDING SYSTEM

Details for Australian Patent Application No. 2003302708 (hide)

Owner KABUSHIKI KAISHA WATANABE SHOKO

Inventors FUKAGAWA, Mitsuru

Pub. Number AU-A-2003302708

PCT Number PCT/JP2003/0154

PCT Pub. Number WO2004/051139

Priority 2002-350438 02.12.02 JP

Filing date 2 December 2003

Wipo publication date 23 June 2004

International Classifications

F17D 001/08 Pipe-line systems

H01L 021/31 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

F16K 027/00 Construction of housings

Event Publications

22 July 2004 Complete Application Filed

  Priority application(s): 2002-350438 02.12.02 JP

29 July 2004 Application Open to Public Inspection

  Published as AU-A-2003302708

22 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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