METHOD AND APPARATUS FOR REDUCING SUBSTRATE CHARGING DAMAGE

Details for Australian Patent Application No. 2003302153 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors MOROZ, Paul

Pub. Number AU-A-2003302153

PCT Number PCT/IB2003/0064

PCT Pub. Number WO2004/051710

Priority 60/429,557 29.11.02 US

Filing date 28 November 2003

Wipo publication date 23 June 2004

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

15 July 2004 Complete Application Filed

  Priority application(s): 60/429,557 29.11.02 US

29 July 2004 Application Open to Public Inspection

  Published as AU-A-2003302153

22 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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