METHOD OF FORMING DIELECTRIC FILM

Details for Australian Patent Application No. 2003301469 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors TAKAHASHI, Tsuyoshi; SHINRIKI, Hiroshi; KUBO, Kazumi

Pub. Number AU-A-2003301469

PCT Number PCT/JP2003/0133

PCT Pub. Number WO2004/036640

Priority 2002-305872 21.10.02 JP

Filing date 17 October 2003

Wipo publication date 4 May 2004

International Classifications

H01L 021/316 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 029/78 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

H01L 027/04 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate - the substrate being a semiconductor body

H01L 021/8242 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 027/108 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate - Dynamic random access memory structures

Event Publications

3 June 2004 Complete Application Filed

  Priority application(s): 2002-305872 21.10.02 JP

10 June 2004 Application Open to Public Inspection

  Published as AU-A-2003301469

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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