APPLICATION OF SONIC ENERGY DURING SPUTTERING OF METAL TO FILL OPENING

Details for Australian Patent Application No. 2003301145 (hide)

Owner INTEL CORPORATION

Inventors BRASK, Justin; DOCZY, Mark; TURKOT, Robert, Jr.

Pub. Number AU-A-2003301145

PCT Number PCT/US2003/0406

PCT Pub. Number WO2004/082016

Priority 10/382,452 06.03.03 US

Filing date 18 December 2003

Wipo publication date 30 September 2004

International Classifications

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/285 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 May 2004 Complete Application Filed

  Priority application(s): 10/382,452 06.03.03 US

4 November 2004 Application Open to Public Inspection

  Published as AU-A-2003301145

24 November 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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