METHOD OF ADJUSTING THE ABSORPTIVITY OF INTEGRATED CIRCUITS PRIOR TO RAPID THERMAL PROCESSING

Details for Australian Patent Application No. 2003300340 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors EHRICHS, Edward, E.

Pub. Number AU-A-2003300340

PCT Number PCT/US2003/0411

PCT Pub. Number WO2004/095546

Priority 10/402,166 26.03.03 US

Filing date 22 December 2003

Wipo publication date 19 November 2004

International Classifications

H01L 021/02 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

H01L 021/324 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 May 2004 Complete Application Filed

  Priority application(s): 10/402,166 26.03.03 US

16 December 2004 Application Open to Public Inspection

  Published as AU-A-2003300340

15 December 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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