COATER HAVING SUBSTRATE CLEANING DEVICE AND COATING DEPOSITION METHODS EMPLOYING SUCH COATER

Details for Australian Patent Application No. 2003300037 (hide)

Owner CARDINAL CG COMPANY

Inventors HARTIG, Klaus

Pub. Number AU-A-2003300037

PCT Number PCT/US2003/0415

PCT Pub. Number WO2004/061151

Priority 60/437,518 31.12.02 US

Filing date 31 December 2003

Wipo publication date 29 July 2004

International Classifications

C23C 014/10 Coating by vacuum evaporation, by sputtering or by ion implantation - Glass or silica

C23C 014/34 Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

C23C 014/50 Coating by vacuum evaporation, by sputtering or by ion implantation - Substrate holders

C23C 014/46 Coating by vacuum evaporation, by sputtering or by ion implantation - by ion beam produced by an external ion source

C23C 014/56 Coating by vacuum evaporation, by sputtering or by ion implantation - Apparatus specially adapted for continuous coating

Event Publications

27 May 2004 Complete Application Filed

  Priority application(s): 60/437,518 31.12.02 US

2 September 2004 Application Open to Public Inspection

  Published as AU-A-2003300037

22 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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