Differential critical dimension and overlay metrology apparatus and measurement method

Details for Australian Patent Application No. 2003300005 (hide)

Owner International Business Machines Corporation

Inventors Ausschnitt, Christopher

Pub. Number AU-A-2003300005

PCT Number PCT/US2003/0414

PCT Pub. Number WO2005/069082

Filing date 19 December 2003

Wipo publication date 3 August 2005

International Classifications

G03F 009/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

G01B 009/00 Instruments as specified in the subgroups and characterised by the use of optical measuring means

Event Publications

27 May 2004 Complete Application Filed

22 September 2005 Application Open to Public Inspection

  Published as AU-A-2003300005

7 September 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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