NONDESTRUCTIVE CHARACTERIZATION OF THIN FILMS USING MEASURED BASIS SPECTRA AND/OR BASED ON ACQUIRED SPECTRUM

Details for Australian Patent Application No. 2003299965 (hide)

Owner PHYSICAL ELECTRONICS, INC.

Inventors LARSON, Paul, E.; WATSON, David, G.; MOULDER, John, F.

Pub. Number AU-A-2003299965

PCT Number PCT/US2003/0413

PCT Pub. Number WO2004/061388

Priority 10/330,317 27.12.02 US; 10/330,383 27.12.02 US

Filing date 23 December 2003

Wipo publication date 29 July 2004

International Classifications

G01B 011/06 Measuring arrangements characterised by the use of optical means - for measuring thickness

Event Publications

27 May 2004 Complete Application Filed

  Priority application(s): 10/330,317 27.12.02 US; 10/330,383 27.12.02 US

2 September 2004 Application Open to Public Inspection

  Published as AU-A-2003299965

22 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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