A METHOD FOR MAKING A SEMICONDUCTOR DEVICE HAVING A HIGH-K GATE DIELECTRIC

Details for Australian Patent Application No. 2003299751 (hide)

Owner INTEL CORPORATION

Inventors BRASK, Justin; DOCZY, Mark; BARNAK, John; CHAU, Robert

Pub. Number AU-A-2003299751

PCT Number PCT/US2003/0406

PCT Pub. Number WO2004/084311

Priority 10/391,816 18.03.03 US

Filing date 18 December 2003

Wipo publication date 11 October 2004

International Classifications

H01L 029/51 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

H01L 021/28 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/336 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 May 2004 Complete Application Filed

  Priority application(s): 10/391,816 18.03.03 US

11 November 2004 Application Open to Public Inspection

  Published as AU-A-2003299751

8 December 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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