RE-CRYSTALLIZATION OF SEMICONDUCTOR SURFACE FILM AND DOPING OF SEMICONDUCTOR BY ENERGETIC CLUSTER IRRADIATION

Details for Australian Patent Application No. 2003299614 (hide)

Event Publications

27 May 2004 Complete Application Filed

Priority application(s): 60/433,866 12.12.02 US

5 August 2004 Application Open to Public Inspection

Published as AU-A-2003299614

22 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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