METHOD AND APPARATUS FOR MONITORING A PLASMA IN A MATERIAL PROCESSING SYSTEM

Details for Australian Patent Application No. 2003299437 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors KLEKOTKA, James, E.

Pub. Number AU-A-2003299437

PCT Number PCT/IB2003/0064

PCT Pub. Number WO2004/059689

Priority 10/331,341 31.12.02 US

Filing date 25 November 2003

Wipo publication date 22 July 2004

International Classifications

H01J 037/00 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

27 May 2004 Complete Application Filed

  Priority application(s): 10/331,341 31.12.02 US

26 August 2004 Application Open to Public Inspection

  Published as AU-A-2003299437

15 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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