METHOD OF THE PRODUCTION OF CAVITIES IN A SILICON SHEET

Details for Australian Patent Application No. 2003299368 (hide)

Owner S.O.I. TEC SILICON ON INSULATOR TECHNOLOGIES

Inventors SCHWARZENBACH, Walter; MALEVILLE, Christophe

Pub. Number AU-A-2003299368

PCT Number PCT/FR2003/0038

PCT Pub. Number WO2004/059725

Priority 02/16409 20.12.02 FR; 60/448,124 20.02.03 US

Filing date 19 December 2003

Wipo publication date 22 July 2004

International Classifications

H01L 021/762 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/311 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 May 2004 Complete Application Filed

  Priority application(s): 02/16409 20.12.02 FR; 60/448,124 20.02.03 US

26 August 2004 Application Open to Public Inspection

  Published as AU-A-2003299368

15 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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