METHOD FOR MAKING A PLANAR SUSPENDED MICROSTRUCTURE, USING A SACRIFICIAL LAYER OF POLYMER MATERIAL AND RESULTING COMPONENT

Details for Australian Patent Application No. 2003299341 (hide)

Owner COMMISSARIAT A L'ENERGIE ATOMIQUE

Inventors MAEDER-PACHURKA, Catherine; SILLON, Nicolas; ROBERT, Philippe; MICHEL, France

Pub. Number AU-A-2003299341

PCT Number PCT/FR2003/0037

PCT Pub. Number WO2004/056698

Priority 02/16088 18.12.02 FR

Filing date 18 December 2003

Wipo publication date 14 July 2004

International Classifications

B81C 001/00 Manufacture or treatment of devices or systems in or on a substrate

B81B 003/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

Event Publications

27 May 2004 Complete Application Filed

  Priority application(s): 02/16088 18.12.02 FR

19 August 2004 Application Open to Public Inspection

  Published as AU-A-2003299341

15 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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