METHOD FOR THE PRODUCTION OF A SEMICONDUCTOR COMPONENT

Details for Australian Patent Application No. 2003299284 (hide)

Owner FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V

Inventors KOHLMANN-VON PLATEN, Klaus; BERNT, Helmut; FRIEDRICH, Detlef

Pub. Number AU-A-2003299284

PCT Number PCT/DE2003/0042

PCT Pub. Number WO2004/064123

Priority 103 00 577.3 10.01.03 DE

Filing date 23 December 2003

Wipo publication date 10 August 2004

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 May 2004 Complete Application Filed

  Priority application(s): 103 00 577.3 10.01.03 DE

9 September 2004 Application Open to Public Inspection

  Published as AU-A-2003299284

13 October 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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