METHOD OF PATTERNING CAPACITORS AND CAPACITORS MADE THEREBY

Details for Australian Patent Application No. 2003299121 (hide)

Owner INFINEON TECHNOLOGIES AG

Inventors LIAN, Jenny; ZHUANG, Haoren; EGGER, Ulrich; HORNIK, Karl

Pub. Number AU-A-2003299121

PCT Number PCT/SG2003/0002

PCT Pub. Number WO2004/030069

Priority 10/260,229 27.09.02 US

Filing date 17 September 2003

Wipo publication date 19 April 2004

International Classifications

H01L 021/311 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/02 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

Event Publications

13 May 2004 Complete Application Filed

  Priority application(s): 10/260,229 27.09.02 US

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003299121

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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