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Details for Australian Patent Application No. 2003299056 (hide)

Owner LAM RESEARCH CORPORATION

Inventors BAILEY, III, Andrew, D.; WILCOXSON, Mark; LUQUE, Jorge

Pub. Number AU-A-2003299056

PCT Number PCT/US2003/0304

PCT Pub. Number WO2004/030083

Priority 10/331,194 24.12.02 US; 10/452,248 30.05.03 US; 60/414,021 26.09.02 US

Filing date 24 September 2003

Wipo publication date 19 April 2004

International Classifications

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

13 May 2004 Complete Application Filed

  Priority application(s): 10/331,194 24.12.02 US; 10/452,248 30.05.03 US; 60/414,021 26.09.02 US

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003299056

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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