Method for forming non-amorphous, ultra-thin semiconductor devices using sacrificial implantation layer

Details for Australian Patent Application No. 2003298876 (hide)

Owner International Business Machines Corporation

Inventors Dokumaci, Omer H.; Ronsheim, Paul

Pub. Number AU-A-2003298876

PCT Number PCT/US2003/0385

PCT Pub. Number WO2005/067035

Filing date 4 December 2003

Wipo publication date 12 August 2005

International Classifications

H01L 021/8242 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

6 May 2004 Complete Application Filed

15 September 2005 Application Open to Public Inspection

  Published as AU-A-2003298876

24 August 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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