A METHOD FOR MEASURING AND REDUCING ANGULAR DEVIATIONS OF A CHARGED PARTICLE BEAM

Details for Australian Patent Application No. 2003298774 (hide)

International Classifications

Event Publications

6 May 2004 Complete Application Filed

Priority application(s): 60/445,780 05.02.03 US

7 October 2004 Application Open to Public Inspection

Published as AU-A-2003298774

1 September 2005 Corrigenda

Applications OPI - Name Index Under the name APPLIED MATERIALS ISRAEL, LTD., Application No. 2003298774, under INID (71) correct the name to read APPLIED MATERIALS, INC.; INTERNATIONAL BUSINESS MACHINES CORPORATION; APPLIED MATERIALS ISRAEL, LTD.

20 October 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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