APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY

Details for Australian Patent Application No. 2003298003 (hide)

Owner KLA-TENCOR TECHNOLOGIES CORPORATION

Inventors ADEL, Michael; FABRIKANT, Anatoly; BEVIS, Christopher, F.; FIELDEN, John; BAREKET, Noah; GROSS, Ken; ZALICKI, Piotr; WACK, Dan; DECECCO, Paola; DZIURA, Thaddeus, G.; MIEHER, Walter, D.; LEVY, Ady; GOLOVANEVSKY, Boris; FRIEDMANN, Michael; SMITH, Ian

Pub. Number AU-A-2003298003

PCT Number PCT/US2003/0387

PCT Pub. Number WO2004/053426

Priority 60/431,314 05.12.02 US; 60/440,970 17.01.03 US; 60/449,496 22.02.03 US; 60/498,524 27.08.03 US; 60/504,093 19.09.03 US

Filing date 5 December 2003

Wipo publication date 30 June 2004

International Classifications

G01B 011/00 Measuring arrangements characterised by the use of optical means

G03F 009/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

Event Publications

6 May 2004 Complete Application Filed

  Priority application(s): 60/431,314 05.12.02 US; 60/440,970 17.01.03 US; 60/449,496 22.02.03 US; 60/498,524 27.08.03 US; 60/504,093 19.09.03 US

5 August 2004 Application Open to Public Inspection

  Published as AU-A-2003298003

25 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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