APPARATUS AND PROCESS FOR MEASURING ULTRAVIOLET (UV) LIGHT INTENSITIES

Details for Australian Patent Application No. 2003297951 (hide)

Owner AXCELIS TECHNOLOGIES INC.

Inventors ZHANG, Betty; JANOS, Alan

Pub. Number AU-A-2003297951

PCT Number PCT/US2003/0399

PCT Pub. Number WO2004/059270

Priority 10/248,074 16.12.02 US

Filing date 16 December 2003

Wipo publication date 22 July 2004

International Classifications

G01J 003/51 Spectrometry - using colour filters

G01J 001/04 Photometry, e.g. photographic exposure meter - Optical or mechanical part

G01J 001/42 Photometry, e.g. photographic exposure meter - using electric radiation detectors

G11C 016/18 Erasable programmable read-only memories

H01L 021/336 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

6 May 2004 Complete Application Filed

  Priority application(s): 10/248,074 16.12.02 US

26 August 2004 Application Open to Public Inspection

  Published as AU-A-2003297951

15 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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