LOCOS ISOLATION FOR FULLYDEPLETED SOI DEVICES

Details for Australian Patent Application No. 2003297804 (hide)

Owner INTEL CORPORATION (a Delaware Corporation)

Inventors BOHR, Mark; TSAI, Julie

Pub. Number AU-A-2003297804

PCT Number PCT/US2003/0391

PCT Pub. Number WO2004/061946

Priority 10/330,842 26.12.02 US

Filing date 8 December 2003

Wipo publication date 29 July 2004

International Classifications

H01L 021/762 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

6 May 2004 Complete Application Filed

  Priority application(s): 10/330,842 26.12.02 US

2 September 2004 Application Open to Public Inspection

  Published as AU-A-2003297804

15 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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