SYSTEM AND METHOD FOR INSPECTION USING WHITE LIGHT INTERFEROMETRY

Details for Australian Patent Application No. 2003297365 (hide)

Owner SEMICONDUCTOR TECHNOLOGIES AND INSTRUMENTS, INC.

Inventors MATHUR, Sanjeev

Pub. Number AU-A-2003297365

PCT Number PCT/US2003/0405

PCT Pub. Number WO2004/057267

Priority 60/434,926 19.12.02 US

Filing date 19 December 2003

Wipo publication date 14 July 2004

International Classifications

G01B 009/02 Instruments as specified in the subgroups and characterised by the use of optical measuring means - Interferometers

Event Publications

6 May 2004 Complete Application Filed

  Priority application(s): 60/434,926 19.12.02 US

19 August 2004 Application Open to Public Inspection

  Published as AU-A-2003297365

8 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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