METHOD AND APPARATUS FOR METROLOGICAL PROCESS CONTROL IMPLEMENTING COMPLIMENTARY SENSORS

Details for Australian Patent Application No. 2003297336 (hide)

Owner LAM RESEARCH CORPORATION

Inventors OWCZARZ, Aleksander; HEMKER, David; BRIGHT, Nicolas, J.; GOTKIS, Yehiel; KISTLER, Rodney

Pub. Number AU-A-2003297336

PCT Number PCT/US2003/0403

PCT Pub. Number WO2004/059242

Priority 10/328,884 23.12.02 US

Filing date 17 December 2003

Wipo publication date 22 July 2004

International Classifications

G01B 007/06 Measuring arrangements characterised by the use of electric or magnetic means

G01R 033/12 Arrangements or instruments for measuring magnetic variables - Measuring magnetic properties of articles or specimens of solids or fluids

Event Publications

6 May 2004 Complete Application Filed

  Priority application(s): 10/328,884 23.12.02 US

26 August 2004 Application Open to Public Inspection

  Published as AU-A-2003297336

8 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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