SYSTEM TO IDENTIFY A WAFER MANUFACTURING PROBLEM AND METHOD THEREFOR

Details for Australian Patent Application No. 2003297328 (hide)

Owner APPLIED MATERIALS, INC.

Inventors GAVRA, Yifah; DOR, Amos

Pub. Number AU-A-2003297328

PCT Number PCT/US2003/0403

PCT Pub. Number WO2004/059723

Priority 10/327,174 20.12.02 US

Filing date 19 December 2003

Wipo publication date 22 July 2004

International Classifications

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

6 May 2004 Complete Application Filed

  Priority application(s): 10/327,174 20.12.02 US

26 August 2004 Application Open to Public Inspection

  Published as AU-A-2003297328

8 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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