METHOD AND SYSTEM FOR OPTICAL INSPECTION OF PATTERNED AND NON-PATTERNED OBJECTS

Details for Australian Patent Application No. 2003297287 (hide)

Owner APPLIED MATERIALS ISRAEL, LTD.

Inventors SOME, Daniel, I.

Pub. Number AU-A-2003297287

PCT Number PCT/US2003/0368

PCT Pub. Number WO2004/061440

Priority 60/437,545 30.12.02 US; 10/453,149 02.06.03 US

Filing date 17 November 2003

Wipo publication date 29 July 2004

International Classifications

G01N 021/956 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light

G01N 021/21 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light - Polarisation-affecting properties

G01N 021/95 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light

Event Publications

6 May 2004 Complete Application Filed

  Priority application(s): 60/437,545 30.12.02 US; 10/453,149 02.06.03 US

2 September 2004 Application Open to Public Inspection

  Published as AU-A-2003297287

1 September 2005 Corrigenda

  Applications OPI - Name Index Under the name APPLIED MATERIALS ISRAEL, LTD., Application No. 2003297287, under INID (71) correct the name to read APPLIED MATERIALS ISRAEL, LTD.; APPLIED MATERIALS, INC.

15 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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