DIAMOND CONDITIONING OF SOFT CHEMICAL MECHANICAL PLANARIZATION/POLISHING (CMP) POLISHING PADS

Details for Australian Patent Application No. 2003297156 (hide)

Owner INTEL CORPORATION

Inventors YARDENI, Barak; ELDAD, Boaz; SLUTSKY, Philip; DORON, Dan

Pub. Number AU-A-2003297156

PCT Number PCT/US2003/0399

PCT Pub. Number WO2004/094106

Priority 10/402,578 28.03.03 US

Filing date 15 December 2003

Wipo publication date 19 November 2004

International Classifications

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

B24B 053/007 Devices or means for dressing or conditioning abrasive surfaces - Cleaning of grinding wheels

Event Publications

6 May 2004 Complete Application Filed

  Priority application(s): 10/402,578 28.03.03 US

16 December 2004 Application Open to Public Inspection

  Published as AU-A-2003297156

15 December 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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