IN-PROCESS CORRECTION OF STAGE MIRROR DEFORMATIONS DURING A PHOTOLITHOGRAPHY EXPOSURE CYCLE

Details for Australian Patent Application No. 2003297000 (hide)

Owner ZYGO CORPORATION

Inventors HILL, Henry, A.

Pub. Number AU-A-2003297000

PCT Number PCT/US2003/0396

PCT Pub. Number WO2004/053425

Priority 60/432,848 12.12.02 US

Filing date 12 December 2003

Wipo publication date 30 June 2004

International Classifications

G01B 009/00 Instruments as specified in the subgroups and characterised by the use of optical measuring means

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

6 May 2004 Complete Application Filed

  Priority application(s): 60/432,848 12.12.02 US

5 August 2004 Application Open to Public Inspection

  Published as AU-A-2003297000

8 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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