MIXTURE OF OLIGOMERIC PHENAZINIUM COMPOUNDS AND ACID BATH FOR ELECTROLYTICALLY DEPOSITING A COPPER DEPOSIT

Details for Australian Patent Application No. 2003296632 (hide)

Owner ATOTECH DEUTSCHLAND GMBH

Inventors BRUNNER, Heiko; DAHMS, Wolfgang; MORITZ, Thomas; GRIESER, Udo; OZKOK, Akif

Pub. Number AU-A-2003296632

PCT Number PCT/EP2003/0139

PCT Pub. Number WO2004/057061

Priority 102 61 852.6 20.12.02 DE

Filing date 9 December 2003

Wipo publication date 14 July 2004

International Classifications

C25D 003/38 Electroplating - of copper

C25D 007/12 Electroplating characterised by the article coated - Semiconductors

Event Publications

6 May 2004 Complete Application Filed

  Priority application(s): 102 61 852.6 20.12.02 DE

19 August 2004 Application Open to Public Inspection

  Published as AU-A-2003296632

8 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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