METHOD FOR THE TREATMENT OF A RESIST SYSTEM AND CORRESPONDING DEVICE

Details for Australian Patent Application No. 2003296546 (hide)

Owner INFINEON TECHNOLOGIES AG

Inventors DOMKE, Wolf-Dieter; KRAGLER, Karl; LOWACK, Klaus; SCHWARZL, Siegfried

Pub. Number AU-A-2003296546

PCT Number PCT/DE2003/0042

PCT Pub. Number WO2004/057425

Priority 102 61 845.3 20.12.02 DE

Filing date 16 December 2003

Wipo publication date 14 July 2004

International Classifications

G03F 007/38 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Treatment before imagewise removal, e.g. prebaking

G03F 007/039 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Macromolecular compounds which are photodegradable, e.g. positive electron resists

Event Publications

6 May 2004 Complete Application Filed

  Priority application(s): 102 61 845.3 20.12.02 DE

19 August 2004 Application Open to Public Inspection

  Published as AU-A-2003296546

8 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003296547-CYLINDER AND DEVICE FOR GUIDING A MATERIAL WEB

2003296545-USE OF A TRPM8-ACTIVATING SUBSTANCE FOR THE TREATMENT OF TUMOURS