Owner International Business Machines Corporation

Inventors Chidambarrao, Dureseti; Doris, Bruce B.; Huang, Hsiang-Jen; Yang, Haining; Buehrer, Frederick William

Pub. Number AU-A-2003296359

PCT Number PCT/US2003/0390

PCT Pub. Number WO2005/064665

Filing date 8 December 2003

Wipo publication date 21 July 2005

H01L 021/336 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 029/167 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

H01L 021/425 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 027/01 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate -

H01L 029/76 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier