EXTREME ULTRAVIOLET LIGHT SOURCE AND TARGET FOR EXTREME ULTRAVIOLET LIGHT SOURCE

Details for Australian Patent Application No. 2003296155 (hide)

Owner KANSAI TECHNOLOGY LICENSING ORGANIZATION CO., LTD.

Inventors MIYANAGA, Noriaki; NAKATSUKA, Masahiro; IZAWA, Yasukazu; YAMANAKA, Tatsuhiko; NAKAI, Mitsuo; SHIGEMORI, Keisuke; MURAKAMI, Masakatsu; SHIMADA, Yoshinori; UCHIDA, Shigeaki; FURUKAWA, Hiroyuki; SUNAHARA, Atsushi; ZHAKHOVSKI, Vasilli; MATSUI, Ryouji; HIBINO, Takahiro; OKUNO, Tomoharu; NAGAI, Keiji; NISHIMURA, Hiroaki; NORIMATSU, Takayoshi; NISHIHARA, Katsunobu

Pub. Number AU-A-2003296155

PCT Number PCT/JP2003/0169

PCT Pub. Number WO2004/086467

Priority 2003-85584 26.03.03 JP

Filing date 26 December 2003

Wipo publication date 18 October 2004

International Classifications

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H05G 001/00 X-ray apparatus involving X-ray tubes

H05H 001/24 Generating plasma - Generating plasma

H01J 035/08 X-ray tubes

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G21K 001/00 Arrangements for handling radiation or particles, e.g. focusing, moderating

G21K 005/02 Irradiation devices - having no beam-forming means

Event Publications

29 April 2004 Complete Application Filed

  Priority application(s): 2003-85584 26.03.03 JP

18 November 2004 Application Open to Public Inspection

  Published as AU-A-2003296155

15 December 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003296156-DISPERSE COLOR MATERIAL AND PROCESS FOR PRODUCING THE SAME, WATER-COLOR INK EMPLOYING IT, INK TANK, INKJET RECORDER, INKJET RECORDING METHOD AND INKJET RECORDED IMAGE

2003296154-ELECTROLYTE, NEGATIVE ELECTRODE AND BATTERY