METHOD AND DEVICE FOR PLASMA-ETCHING ORGANIC MATERIAL FILM

Details for Australian Patent Application No. 2003296132 (hide)

International Classifications

Event Publications

29 April 2004 Complete Application Filed

Priority application(s): 2002-380558 27.12.02 JP

2 September 2004 Application Open to Public Inspection

Published as AU-A-2003296132

1 September 2005 Corrigenda

Applications OPI - Name Index Under the name TOKYO ELECTRON LIMITED, Application No. 2003296132, under INID (71) correct the name to read TOKYO ELECTRON LIMITED; KABUSHIKI KAISHA TOSHIBA

15 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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