METHOD AND APPARATUS FOR TREATING A SUBSTRATE

Details for Australian Patent Application No. 2003296050 (hide)

Owner OTB GROUP B.V.

Inventors HOMPUS, Michael, Adrianus, Theodorus; BIJKER, Martin, Dinant; DINGS, Franciscus, Cornelius; EVERS, Marinus, Franciscus, Johanus

Pub. Number AU-A-2003296050

PCT Number PCT/NL2003/0008

PCT Pub. Number WO2004/053190

Priority 1022155 12.12.02 NL

Filing date 12 December 2003

Wipo publication date 30 June 2004

International Classifications

C23C 016/50 Chemical deposition or plating by decomposition - using electric discharges

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

C23C 016/04 Chemical deposition or plating by decomposition - Coating on selected surface areas, e.g. using masks

C23C 016/513 Chemical deposition or plating by decomposition

Event Publications

22 April 2004 Complete Application Filed

  Priority application(s): 1022155 12.12.02 NL

5 August 2004 Application Open to Public Inspection

  Published as AU-A-2003296050

1 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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