PHOTOMASK AND METHOD FOR CREATING A PROTECTIVE LAYER ON THE SAME

Details for Australian Patent Application No. 2003295844 (hide)

Owner DUPONT PHOTOMASKS, INC.

Inventors DIEU, Laurent; CHOVINO, Christian

Pub. Number AU-A-2003295844

PCT Number PCT/US2003/0374

PCT Pub. Number WO2004/049063

Priority 60/428,999 25.11.02 US; 60/457,400 25.03.03 US

Filing date 25 November 2003

Wipo publication date 18 June 2004

International Classifications

G03F 001/14 Preparation of originals for the photomechanical production of textured or patterned surfaces - Originals characterised by structural details, e.g. supports, cover layers, pellicle rings

Event Publications

22 April 2004 Complete Application Filed

  Priority application(s): 60/428,999 25.11.02 US; 60/457,400 25.03.03 US

22 July 2004 Application Open to Public Inspection

  Published as AU-A-2003295844

18 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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