Micro electro-mechanical system device with piezoelectric thin film actuator

Details for Australian Patent Application No. 2003295553 (hide)

Owner Raytheon Company

Inventors Allison, Robert C.; Park, Joon; Nakahira, Ron K.

Agent Griffith Hack

Pub. Number AU-B-2003295553

PCT Number PCT/US2003/0365

PCT Pub. Number WO2004/047190

Priority 10/294,413 14.11.02 US

Filing date 14 November 2003

Wipo publication date 15 June 2004

Acceptance publication date 31 May 2007

International Classifications

H01L 41/09 (2006.01) Piezo-electric elements in general -

B81B 3/00 (2006.01) Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

H01G 5/16 (2006.01) Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft

H01H 57/00 (2006.01) Electrostrictive relays

H01L 41/24 (2006.01) Piezo-electric elements in general - of elements of ceramic composition

Event Publications

22 April 2004 Complete Application Filed

  Priority application(s): 10/294,413 14.11.02 US

15 July 2004 Application Open to Public Inspection

  Published as AU-B-2003295553

31 May 2007 Application Accepted

  Published as AU-B-2003295553

11 October 2007 Standard Patent Sealed

10 June 2010 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This patent ceased under section 143(a), or Expired. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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