MEMS SCANNING MIRROR WITH TUNABLE NATURAL FREQUENCY

Details for Australian Patent Application No. 2003295445 (hide)

Owner ADVANCED NANO SYSTEMS

Inventors KUO, Ting-Tung; FU, Yee-Chung

Pub. Number AU-A-2003295445

PCT Number PCT/US2003/0357

PCT Pub. Number WO2004/049034

Priority 10/302,387 22.11.02 US; 10/302,413 22.11.02 US

Filing date 10 November 2003

Wipo publication date 18 June 2004

International Classifications

G02B 026/08 Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating - for controlling the direction of light

Event Publications

22 April 2004 Complete Application Filed

  Priority application(s): 10/302,387 22.11.02 US; 10/302,413 22.11.02 US

22 July 2004 Application Open to Public Inspection

  Published as AU-A-2003295445

11 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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