APPARATUS AND METHOD FOR TREATING OBJECTS WITH RADICALS GENERATED FROM PLASMA

Details for Australian Patent Application No. 2003295391 (hide)

Event Publications

22 April 2004 Complete Application Filed

Priority application(s): 10/288,345 04.11.02 US

1 July 2004 Application Open to Public Inspection

Published as AU-A-2003295391

21 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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