SUBSTRATE HOLDING MECHANISM, SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD

Details for Australian Patent Application No. 2003295242 (hide)

International Classifications

Event Publications

22 April 2004 Complete Application Filed

Priority application(s): NO. 2002-380583 27.12.02 JP; NO. 2003-188775 30.06.03 JP

2 September 2004 Application Open to Public Inspection

Published as AU-A-2003295242

1 September 2005 Corrigenda

Applications OPI - Name Index Under the name EBARA CORPORATION, Application No. 2003295242, under INID (71) correct the name to read EBARA CORPORATION; KABUSHIKI KAISHA TOSHIBA

15 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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