MICROMECHANICAL OR MICROOPTOELECTRONIC DEVICES WITH DEPOSIT OF GETTER MATERIAL AND INTEGRATED HEATER, AND SUPPORT FOR THE PRODUCTION THEREOF

Details for Australian Patent Application No. 2003295223 (hide)

Owner SAES GETTERS S.p.A.

Inventors AMIOTTI, Marco

Pub. Number AU-A-2003295223

PCT Number PCT/IT2003/0008

PCT Pub. Number WO2004/065289

Priority MI 2003 A 000069 17.01.03 IT

Filing date 24 December 2003

Wipo publication date 13 August 2004

International Classifications

B81B 007/00 Micro-structural systems

Event Publications

22 April 2004 Complete Application Filed

  Priority application(s): MI 2003 A 000069 17.01.03 IT

16 September 2004 Application Open to Public Inspection

  Published as AU-A-2003295223

13 October 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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