METHOD AND APPARATUS FOR PLANARIZATION OF A MATERIAL BY GROWING A SACRIFICIAL FILM WITH CUSTOMIZED THICKNESS PROFILE

Details for Australian Patent Application No. 2003294681 (hide)

Owner APPLIED MATERIALS, INC.

Inventors CHACIN, Juan; FORSTNER, Hali; ACHUTHARAMAN, Vedapuram, S.

Pub. Number AU-A-2003294681

PCT Number PCT/US2003/0392

PCT Pub. Number WO2004/061932

Priority 10/325,673 19.12.02 US

Filing date 11 December 2003

Wipo publication date 29 July 2004

International Classifications

H01L 021/321 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/3105 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

22 April 2004 Complete Application Filed

  Priority application(s): 10/325,673 19.12.02 US

2 September 2004 Application Open to Public Inspection

  Published as AU-A-2003294681

8 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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