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Details for Australian Patent Application No. 2003294403 (hide)

Owner International Business Machines Corporation

Inventors Petrarca, Kevin S.; Cheng, Tien-Jen; Knickerbocker, Sarah H.; Volant, Richard P.; Walker, George F.

Pub. Number AU-A-2003294403

PCT Number PCT/US2003/0371

PCT Pub. Number WO2005/062367

Filing date 18 November 2003

Wipo publication date 14 July 2005

International Classifications

H01L 021/44 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/48 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/50 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/302 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/461 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

22 April 2004 Complete Application Filed

1 September 2005 Application Open to Public Inspection

  Published as AU-A-2003294403

3 August 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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