MANUFACTURING PROCESS FOR A MULTILAYER STRUCTURE

Details for Australian Patent Application No. 2003294170 (hide)

Owner S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES

Inventors MAZURE, Carlos

Pub. Number AU-A-2003294170

PCT Number PCT/IB2003/0063

PCT Pub. Number WO2004/053961

Priority 02/15499 06.12.02 FR

Filing date 5 December 2003

Wipo publication date 30 June 2004

International Classifications

H01L 021/20 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/762 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

22 April 2004 Complete Application Filed

  Priority application(s): 02/15499 06.12.02 FR

5 August 2004 Application Open to Public Inspection

  Published as AU-A-2003294170

25 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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