ANNEALING PROCESS AND DEVICE OF SEMICONDUCTOR WAFER

Details for Australian Patent Application No. 2003294158 (hide)

Owner WAECHTER, Jean-Marc S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES SCHWARZENBACH, Walter

Inventors SCHWARZENBACH, Walter; WAECHTER, Jean-Marc

Pub. Number AU-A-2003294158

PCT Number PCT/IB2003/0061

PCT Pub. Number WO2004/049393

Priority 0214864 27.11.02 FR

Filing date 27 November 2003

Wipo publication date 18 June 2004

Event Publications

22 April 2004 Complete Application Filed

  Priority application(s): 0214864 27.11.02 FR

22 July 2004 Application Open to Public Inspection

  Published as AU-A-2003294158

11 August 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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