MULTI-AXIS COMPOUND LENS, BEAM SYSTEM MAKING USE OF THE COMPOUND LENS, AND METHOD USING THE COMPOUND LENS

Details for Australian Patent Application No. 2003293862 (hide)

Owner ICT, INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUR HALBLEITERPRUFTECHNIK MBH

Inventors FROSIEN, Jurgen; ADAMEC, Pavel

Pub. Number AU-A-2003293862

PCT Number PCT/EP2003/0141

PCT Pub. Number WO2004/055856

Priority 02 028 345.3 17.12.02 EP

Filing date 12 December 2003

Wipo publication date 9 July 2004

International Classifications

H01J 037/145 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

22 April 2004 Complete Application Filed

  Priority application(s): 02 028 345.3 17.12.02 EP

19 August 2004 Application Open to Public Inspection

  Published as AU-A-2003293862

1 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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