APPARATUS AND METHODS FOR DISPENSING FLUIDS WITH ROTATABLE DISPENSE ARMS

Details for Australian Patent Application No. 2003293565 (hide)

Owner ASML US, INC.

Inventors MANDAL, Robert, P.; BABIKIAN, Dikran

Pub. Number AU-A-2003293565

PCT Number PCT/US2003/0399

PCT Pub. Number WO2004/059705

Priority 10/320,994 16.12.02 US

Filing date 15 December 2003

Wipo publication date 22 July 2004

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03F 007/30 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Imagewise removal using liquid means

B05C 005/02 Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work - from an outlet device in contact, or almost in contact, with the work

Event Publications

22 April 2004 Complete Application Filed

  Priority application(s): 10/320,994 16.12.02 US

26 August 2004 Application Open to Public Inspection

  Published as AU-A-2003293565

1 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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